Equipment Fleet
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ETCH-07 Health Trend
Last 20 runs — degradation detected
Chamber Pressure
mTorr · Normal: 95–105
RF Reflected Power
W · Normal: 2–8
Turbo Pump Speed
RPM · Normal: 29500–30500
Throttle Valve Position
% · Normal: 42–48
Feature Importance
AI-ranked contributors to health degradation
Process Output — Last 20 Runs
Key quality metrics per run
| Run | Etch Rate (Å/min) | Uniformity (%) |
CD Delta (nm) | Yield Loss (%) | Status |